发明名称 |
Fractionated novolak resin copolymer and photoresist composition therefrom |
摘要 |
The present invention provides a method for producing a film forming, fractionated novolak resin copolymer exhibiting fast photospeed and superior performance in a photoresist composition. A method is also provided for producing photoresist composition from such a fractionated novolak resin copolymer and for producing semiconductor devices using such a photoresist composition.
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申请公布号 |
US5928836(A) |
申请公布日期 |
1999.07.27 |
申请号 |
US19970939451 |
申请日期 |
1997.09.29 |
申请人 |
CLARIANT FINANCE (BVI) LIMITED |
发明人 |
RAHMAN, M. DALIL;WANAT, STANLEY F.;COOK, MICHELLE M.;MCKENZIE, DOUGLAS S.;DIXIT, SUNIT S. |
分类号 |
C08G8/00;C08G8/20;C08G8/38;G03F7/023;(IPC1-7):G03C1/72 |
主分类号 |
C08G8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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