Photoresist compositions

摘要

Polymers having an average molecular weight Mw (weight average) of 5,000 to 1,000,000 (measured by gel permeation chromatography), comprising structural repeating units of the formulae I-IV: in which R1, R2, R3 and R4 independently of one another are hydrogen, methyl or halogen, R5 and R6 independently of one another are C1-C6alkyl, R7, R8, R9 and R10 independently of one another are hydrogen, C1-C4alkyl, C1-C4alkoxy or halogen, and w, x, y and z are numbers equal to or greater than 1, with the provision that the quotient which is obtainable from the sum of the structural units having protecting groups divided by the sum of all of the structural units present, obeys the condition 0.10