| 摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate a wafer catching error by correction the dislocation of a wafer after being inclined. SOLUTION: In a wafer carrier inclination device carrying wafer carriers 16 enclosing wafers W, and inclining the wafer carries 16 is provided with a base 11, a fame 12 arranged in an inclinable state at the base 11 so as to accommodate the wafer carriers 16, a inclination means 15 for inclining the frame 12, a pressure-fixing means 14 for pressing the wafer carriers 16 set in the frame 12, to a positioning base arranged at the frame 12 to fix the wafer carrieres 16, and a push-out positioning means 13 for pushing out a wafer W in an inclined state from the wafer carrier bottom part side to position the wafer W.</p> |
