An apparatus and method is provided for vacuum screen printing a greensheet having vias and both vias and open areas whereby vacuum leakage in the apparatus is minimized and avoids bowing of the screen over the open area of the greensheet. An interposer apparatus is provided comprising at least two layers having vertical through openings in registration with the via openings of the greensheet and screen. The interposer also comprises vertical through openings communicating with the open area of the greensheet and with vent channels of the interposer. A porous membrane is also used either alone or in conjunction with the interposer to provide enhanced screening results.
申请公布号
US5927193(A)
申请公布日期
1999.07.27
申请号
US19970951704
申请日期
1997.10.16
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BALZ, JAMES G.;CALLI, CYNTHIA J.;CASEY, JON A.;LONG, DAVID C.;MACKIN, DANIEL S.;O'NEIL, KEITH C.;PETERSON, BRENDA L.;POMERANTZ, GLENN A.