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发明名称
摘要
申请公布号
JP2924359(B2)
申请公布日期
1999.07.26
申请号
JP19910257916
申请日期
1991.10.04
申请人
SEIKOO EPUSON KK
发明人
NANBA TOSHISHIGE
分类号
H01L21/60;H05K3/00;(IPC1-7):H01L21/60
主分类号
H01L21/60
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代理人
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