| 摘要 |
<p>PURPOSE:To lower surface potential by the inner resistance of a carbon film and emit an electron from the wide region of a cold cathode surface so as to stabilize an emitted electron by composing the cold cathode surface with a low resistant conductive film and the carbon film laminated. CONSTITUTION:A cold cathode 6 and a gate electrode 7 are facingly arranged on the surface of an insulation substrate 5, and the surface of the metal electrode 8 of the cold cathode 6 is coated with a carbon film 9. The thickness of the carbon film 9 is not limitted particularly, however, e.g. 500A degree is preferable to operate at low voltage. Next a recessed part 10 is formed on the substrate surface of a part, where the cold cathode 6 and the gate electrode 7 are faced, by etching technique. When the cold cathode formed in this way is operated in a required vacuum, electron emission of about 0.1muA/Tip occurs when e.g. 80V voltage is applied between the cold cathode and the gate electrode, and the cold cathode can be operated in an extremely stable manner.</p> |
