发明名称 OPTICAL MICROSWITCH HAVING ELECTROSTATIC MICROACTUATOR AND METHOD FOR USE THEREOF
摘要 <p>An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180a, 180b) are carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.</p>
申请公布号 WO1999037013(A1) 申请公布日期 1999.07.22
申请号 US1999000648 申请日期 1999.01.12
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