摘要 |
<p>An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180a, 180b) are carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.</p> |