Lateral micromechanical switch for electrical current switching

摘要

A micromechanical switch has a mobile electrode (12) made of single crystal semiconductor material. A micromechanical switch has a support substrate bearing a stationary contact piece (20), a counter-electrode (18) and the fixed end (14) of a mobile electrode (12) made of single crystal semiconductor material. The mobile electrode (12) can move by electrostatic attraction to the counter-electrode (18) for making and breaking of electrical contact to the stationary contact piece (20). An Independent claim is also included for producing a micromechanical switch by (a) preparing a three layer structure comprising a support layer, an interlayer and a single crystal semiconductor material layer; (b) structuring a stationary contact piece (20), a counter-electrode (18) and a switch electrode in the semiconductor material layer; and (c) briefly under-etching the interlayer, except for a fixing region, to form a mobile electrode (12).