| 摘要 |
<p>An apparatus for detecting the presence of wafer cassette, or pod, resting on an arrangement of pins allows cassette detection without interfering with insertion of a transport paddle arm. A cassette resides on an arrangement of beveled pins (24) which mate with corresponding receptacles (28) on the underside. Pins supporting the cassette have a spring (26) biased, hollow outer cylinder (20) coaxially mounted around a center post (22). A cassette places on the pins displaces the outer cylinder downward a sufficient distance to trigger a sensor. Upon removal of the cassette, the outer cylinder is displaced upwards, resetting the sensor.</p> |
