| 摘要 |
<p>A micro-electromechanical scanner is disclosed for the efficient, controlled deflection of light beams. The device comprises a moving rotor (2), a suspension system (4), and a stator (6). The rotor comprises a closed-circuit coil (10) and a mirror (8). The suspension system may be, for example, a set of torsion bars on which the rotor is mounted. The stator may be, for example, a rectangular frame holding the suspension system. When placed in a constant magnetic field (BO) and excited by an alternating magnetic field, the rotor oscillates at the frequency of the alternating magnetic field. The highest deflection angles occur at the natural resonance frequency of the rotor-suspension combination. Additionally, acoustic waves may be used to produce the torque actuation on the rotor for oscillation.</p> |
