Dyed photoresists and methods and articles of manufacture comprising same
摘要
申请公布号
EP0834770(A3)
申请公布日期
1999.07.21
申请号
EP19970115715
申请日期
1997.09.10
申请人
SHIPLEY COMPANY, L.L.C.
发明人
MORI, JAMES MICHAEL;THACKERAY, JAMES, W.;SINTA, ROGER F.;BELL, ROSEMARY;MILLER-FAHEY, ROBIN L.;ADAMS, TIMOTHY G.;ZYDOWSKY, THOMAS M.;PAVELCHEK, EDWARD K.;DOCANTO, MANUEL