DEVICE AND METHOD OF LASER BEAM MACHINING

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining device and its method that bring high yield and that realize high quality drilling. SOLUTION: This invention relates to a laser beam machining device and a method applicable to such device which is provided with a reflected light detector 12, a semiconductor device for detecting the intensity of light emitted by a laser generator 1 and reflected by a workpiece 7, with a control means 15 and the like for controlling the laser generator 1 based on a comparison between the intensity of the reflected light detected by the detector 12 and a prescribed reference value, and with a correcting means for correcting such intensity of the reflected light in accordance with the temperature change of the semiconductor device.