发明名称 MANUFACTURE OF ZINC OXIDE THIN FILM, AND MANUFACTURE OF PHOTOVOLTAIC ELEMENT AND SEMICONDUCTOR ELEMENT SUBSTRATE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To manufacture a highly efficient solar battery at a low cost by stably forming a superior light confining layer in a short time and incorporating the layer in a photovoltaic element. SOLUTION: In a method for manufacturing zinc oxide thin film, an electrodeposition liquid 110 is filtrated at a temperature lower than that of the electrodeposition liquid 110, in an electrodeposition bath 114 at the time of forming a zinc oxide thin film on a conductive substrate 111, by making an electric current flow between the conductive substrate 111 dipped in the liquid 110 and a counter electrode 107 also dipped in the liquid 100. It is desirable to control the temperature of the liquid 110 to less than or equal to 80 deg.C in the filtration.
申请公布号 JPH11195796(A) 申请公布日期 1999.07.21
申请号 JP19980000696 申请日期 1998.01.06
申请人 CANON INC 发明人 NISHIO YUTAKA
分类号 H01L31/04 主分类号 H01L31/04
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