| 摘要 |
<p>PROBLEM TO BE SOLVED: To automatically carry out a reconstruction setting process for operation troubles in a semiconductor production line, so as to enable the reconstruction setting process to be shortened in setting time and prevented from being set erroneously by an operator. SOLUTION: A production control system is equipped with a host computer 6 which comprises an operation procedure data base 1, a check experience knowledge data base 2, an operation instruction part 3, a standard check part 4, and a reconstruction setting part 5; an operation procedure input part 7 which inputs operation procedure data into the operation procedure data base 1, a check experience knowledge data input part 8 which inputs check experience knowledge data into the check experience knowledge data base 2, a production line 10 composed of equipment 11-1 to 11-m, and measurement equipment 12-1 to 12-n, and a communication part 9 which transmits data back and forth from the host computer 6 to the production line 10.</p> |
