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发明名称
Ion implantation apparatus
摘要
申请公布号
GB9912063(D0)
申请公布日期
1999.07.21
申请号
GB19990012063
申请日期
1999.05.24
申请人
APPLIED MATERIALS INC
发明人
分类号
主分类号
代理机构
代理人
主权项
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