| 摘要 |
PROBLEM TO BE SOLVED: To provide a dense ferroelectric thin film which is grainless, in a film thickness direction. SOLUTION: A ferroelectric thin film comprises a burned laminate 10. The laminate 10 includes a Bi seed layer 11 and a Bi-contained ferroelectric layer 13 provided, making contact with the layer 11. In the layer 13, crystallization is advanced by burning from the side of the layer 13 which makes contact with the layer 11. For this reason, the laminate 10 becomes mono-crystal in the film thickness direction. As a result, the ferroelectric thin film (burned laminate 10) turns grainless and dense in the film thickness direction. |
