LASER MACHINING METHOD AND LASER MACHINING APPARATUS

摘要

In order to form a fine pattern at high speed with respect to a material such as quartz glass exhibiting a remarkable band gap, having a short wavelength at absorption edge of light, and having high bond energy between constituent atoms, laser beam being t ransparent as to a material to be worked is irradiated thereupon, at the same time, plasma is produced at a place close to an objective surface of the material to be worked, and ablat ion is generated on the objective surface of the material to be worked by means of inte ractions between the plasma and laser beam irradiated upon the material to be worked, the reby to work the material.