发明名称 Non-volatile memory cell and corresponding manufacturing process.
摘要 The invention relates to a non-volatile memory cell and a manufacturing process therefor. The cell (1,10) is integrated in a semiconductor substrate (2) and comprises: a floating gate transistor (3,30) having a first source region (17,170), first drain region (15,150), and gate region (5,50) projecting over the substrate (2) and intervening between the first source and drain regions (17,15;170,150); and a selection transistor (4,40) having a second source region (19,190), second drain region (20,200), and respective gate region (23,230), projecting over the substrate (2), between the second source and drain regions (19,20;190,200). The first and second regions are lightly doped and the cell comprises mask elements (31a, 310a). <IMAGE>
申请公布号 EP0930655(A1) 申请公布日期 1999.07.21
申请号 EP19980201715 申请日期 1998.05.22
申请人 STMICROELECTRONICS S.R.L. 发明人 PIO, FEDERICO
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
主权项
地址