发明名称 RETICLE PLATE HANDLING MANUAL TOOL
摘要 <p>PROBLEM TO BE SOLVED: To obtain a manual tool capable of holding a reticle without fail, and giving no damage to a thin film for providing an operator with an accurate tactual feedback. SOLUTION: This manual tool 10 for holding a rectangular plate 12 is provided with a handle 16 and a pair of mutually separated holding elements 24, 26 connected to the handle 16. Besides, a movable frame 32 is movably connected to the handle 16. On the other hand, another pair of holding elements 44, 46 mutually separated are connected to the movable frame 32 by a spring to be approached to the first pair of holding elements 26, 30. In such a constitution, a trigger 40 is approached to the handle 16 to be connected to the movable frame 32 so that the second pair of holding elements 44, 46 may be shifted to and from the first pair of holding elements 26, 30 to hold and release the rectangular plate 12.</p>
申请公布号 JPH11195604(A) 申请公布日期 1999.07.21
申请号 JP19980292178 申请日期 1998.10.14
申请人 HEWLETT PACKARD CO <HP> 发明人 DILLE DAVID H
分类号 G03F1/14;B25B9/00;B65G7/12;G03F7/20;H01L21/027;H01L21/677;(IPC1-7):H01L21/027;H01L21/68 主分类号 G03F1/14
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