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发明名称
CHUCK FOR BRUSH SCRUBBER
摘要
申请公布号
JPH11195630(A)
申请公布日期
1999.07.21
申请号
JP19970367609
申请日期
1997.12.26
申请人
ENYA SYSTEM:KK
发明人
YOKOSUKA NORIYOSHI;KAKU YOKOU
分类号
H01L21/304;H01L21/68;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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