| 摘要 |
PROBLEM TO BE SOLVED: To prevent other shaft interference output from appearing easily and to accurately measure acceleration in the direction of each shaft being set, by performing recessed machining to a movable side substrate, and changing an electrode height for increasing the gap between electrodes as compared with the gap of the other two shafts. SOLUTION: A recess that is slightly wider than an electrode area of a fixed side is provided at the specific position of a flexible substrate 12 and an electrode 5 is formed, thus setting a length d0 <+> being longer than an initial gap value d0 of other capacitance elements C1 -C4 by the depth of the recess. As a result, the gap between electrodes can be set to an optimum value for each direction of a specific axis by performing recessed and projecting machining to a movable side substrate for changing an electrode height, and another axis interference output causing asymmetry in terms of structure can be drastically reduced. Also, the output difference and error between specific axes and the another axis interference output can be reduced. Further, increase in noise due to amplification in a sensor circuit can be prevented. |
