SEMICONDUCTOR STRAIN SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor strain sensor having a simple structure and the epitaxial layer region of which is not stained. SOLUTION: A thin strain start section A covers bottom face of a surface- layer region (epitaxial layer region) 31 having a piezoresistance region R and has a covering region 4 exposed on the side of an anti-piezoresistance region. The covering region 4 protects the surface-layer region 31 and the interface of the P-N junction between the surface-layer region 31 and a semiconductor substrate 2 from stains and minute scratches. In order to accurately form the covering region 4 with a sufficient thickness, the etching voltage applied across an electrode faces opposite to the substrate 2 and the surface-layer region 31 is controlled.