| 发明名称 |
Method and apparatus for constant composition delivery of hydride gases for semiconductor processing |
| 摘要 |
Described are methods and apparatuses for the electrochemical generation and constant concentration delivery of high purity gases used in the production of semiconductors and the doping of semiconductors.
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| 申请公布号 |
US5925232(A) |
申请公布日期 |
1999.07.20 |
| 申请号 |
US19960761563 |
申请日期 |
1996.12.06 |
| 申请人 |
ELECTRON TRANFER TECHNOLOGIES |
发明人 |
AYERS, WILLIAM M. |
| 分类号 |
C25B1/02;C25B1/00;C25B9/00;(IPC1-7):C25B1/00 |
主分类号 |
C25B1/02 |
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