发明名称 Photosensitive resin composition for sandblast resist
摘要 Disclosed is a photosensitive resin composition suitable as a resist material against sandblasting for pattern-wise engraving of the surface of a body after photolithographic patterning, which comprises: (a) a urethane compound having a (meth)acrylate group at the molecular end, which is obtained from a polyether or polyester compound having a hydroxy group at the molecular chain end, a diisocyanate compound and a (meth)acrylate compound having a hydroxy group; (b) an alkali-soluble polymeric compound having an acid value in the range from 50 to 250 mg KOH/g; and (c) a photopolymerization initiator.
申请公布号 US5924912(A) 申请公布日期 1999.07.20
申请号 US19980018730 申请日期 1998.02.04
申请人 MATSUSHITA ELECTRONICS CORPORATION;TOKYO OHKA KOGYO CO., LTD. 发明人 TAKEHANA, HIROSHI;YAMAMOTO, TETSUO;OBIYA, HIROYUKI;MIZUSAWA, RYUMA
分类号 G03F7/004;B24C1/04;B24C3/32;C08F290/00;C08F299/06;G03F7/027;G03F7/032;G03F7/033;G03F7/035;G03F7/12;H01J9/02;H01J9/14;H05K3/04;(IPC1-7):B24B1/00 主分类号 G03F7/004
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