| 发明名称 |
Alpha-particle gas-pressure sensor |
| 摘要 |
Gas pressure in a chamber is determined by injecting alpha particles. The alpha particles ionize the gas. By determining a number of gas ions which are ionized, the pressure of the gas in the chamber can be determined.
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| 申请公布号 |
US5925823(A) |
申请公布日期 |
1999.07.20 |
| 申请号 |
US19970897233 |
申请日期 |
1997.05.30 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
BUEHLER, MARTIN G.;BELL, L. DOUGLAS;HECHT, MICHAEL H. |
| 分类号 |
G01L21/32;G01T1/18;(IPC1-7):G01L7/00 |
主分类号 |
G01L21/32 |
| 代理机构 |
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代理人 |
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| 地址 |
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