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发明名称
摘要
申请公布号	JP2921294(B2)	申请公布日期	1999.07.19
申请号	JP19920262564	申请日期	1992.09.30
申请人	NIPPON DENKI KK	发明人	TAKAHASHI NAOYA
分类号	H01L21/82;G06F17/50;(IPC1-7):H01L21/82	主分类号	H01L21/82
代理机构		代理人
主权项
地址

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