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发明名称
摘要
申请公布号
JP2922020(B2)
申请公布日期
1999.07.19
申请号
JP19910164331
申请日期
1991.07.04
申请人
MATSUSHITA DENSHI KOGYO KK
发明人
TAKAHASHI MASAYOSHI;SAITO KAZUO
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
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