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发明名称
PROCESSING APPARATUS
摘要
申请公布号
KR100208815(B1)
申请公布日期
1999.07.15
申请号
KR19960007744
申请日期
1996.03.21
申请人
TOKYO ELECTRON LIMITED
发明人
KSHIKAWA, KENJI;ARAMI, JIYUNICHI
分类号
B01J3/03;C23C16/44;C23C16/455;C23C16/46;C30B25/16;C30B35/00;H01L21/205;H02N13/00;(IPC1-7):H01L21/203
主分类号
B01J3/03
代理机构
代理人
主权项
地址
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