| 摘要 |
A surface acoustic wave (SAW) component has surface electrode structures/fingers (12, 112) bearing a hard layer (21, 121) to provide an optimally increased power compatibility. A SAW component has a lithium tantalate or niobate substrate (10) with surface electrode structures/fingers (12, 112) having a surface normal which is a crystal section rotated about the x-axis or main wave propagation direction (13) through an angle ( eta ) w.r.t. the crystallographic y-axis. A relatively hard layer (21) is provided on the electrode structure/finger surface, the thickness ratio (d1:d) of the electrically conductive material (d1) of the electrode structures/fingers and the material (d2) of the hard layer and the angle ( eta ) being selected to achieve an optimally increased power compatibility of the component. Preferred Features: The hard layer is an anodized aluminum oxide layer formed on aluminum electrode structures or is a sputter deposited layer of silicon, aluminum and/or boron nitride, silicide, boride, carbide, amorphous carbon or diamond.
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