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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR100207608(B1)
申请公布日期
1999.07.15
申请号
KR19960011929
申请日期
1996.04.19
申请人
SUMITOMO METAL INDUSTRIES LIMITED
发明人
YAMADA, MINORU;HAYAMI, DOSHIYATSU
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
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