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发明名称
APPARATUS FIR AND METHOD OF TRANSVERSE POSITION MEASUREMENT IN PROXIMITY LITHOGRAPHIC SYSTEMS
摘要
申请公布号
KR100209463(B1)
申请公布日期
1999.07.15
申请号
KR19910018035
申请日期
1991.10.11
申请人
HOLTRONIC TECHNOLOGIES LTD.
发明人
CLUBE, FRANCIS STACE MURRAY
分类号
G03F1/08;G03F9/00;G03H1/00;H01L21/027;(IPC1-7):G01B9/00
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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