<p>The invention pertains to a coating apparatus and method wherein a movably mounted dispensing head (101) is provided for coating a substrate (106) supported on a chuck (201). The moving head (101) configuration reduces system footprint and diminishes leveling problems. A powered shuttle mechanism (301) carries the dispensing head (101) above the substrate (106) to be coated while riding on an air bearing located underneath the chuck (201) holding the substrate thereby providing rigidity and reducing system footprint. A chuck support (202) is designed to accommodate anticipated vertical sag in the dispensing head (101) by supporting the chuck (201) at points along its periphery thereby permitting the chuck (201) to sag in conjunction with the dispensing head (101). The shuttle mechanism (301) is equipped to automatically adjust the height of the dispensing head with respect to the substrate (106) to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. The apparatus further includes utility station (108) comprising equipment for cleaning and priming the dispensing head (101).</p>
