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发明名称
SILICIDE MAKING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100209931(B1)
申请公布日期
1999.07.15
申请号
KR19960022856
申请日期
1996.06.21
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
YU, TAE-JUNG;KWUN, HYUK-JIN
分类号
B21D28/00;H01L21/30;(IPC1-7):H01L21/30
主分类号
B21D28/00
代理机构
代理人
主权项
地址
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