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发明名称
PROCESS FOR FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100207524(B1)
申请公布日期
1999.07.15
申请号
KR19960055865
申请日期
1996.11.20
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
LEE, MYUNG-BUM;PARK, BYUNG-RYUL
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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