| 摘要 |
<p>A method of manufacturing an ink-jet head of an ink-jet printer, which uses large, low-cost and easy-to-handle substrates to improve productivity. Individual electrodes (101) are formed on a glass substrate (100) and covered with an insulating film (202). A sacrificial layer (110) is formed on the insulating film (202), and a vibration plate (201) is formed on the sacrificial layer. Windows (212) are opened in a support of the vibration plate (201), and the sacrificial layer (110) is etched through the windows (212) to form an electrostatic actuator structure. To close the windows (212), nickel is deposited over the entire surface, and partition bases (213) are formed by patterning. Cavity partitions (214) are formed by nickel electroforming, and nozzle plates (300) are connected.</p> |
