发明名称 METHOD AND DEVICE FOR TREATING SUBSTRATES
摘要 The invention relates to a method for treating substrates in a container with at least one fluid and ultrasound. The opposite walls of the container have at least two ultrasound radiation areas. A particularly good, homogeneous and intensive ultrasound treatment of the substrates is achieved due to the fact that the ultrasound radiation areas can be individually controlled.
申请公布号 WO9935672(A1) 申请公布日期 1999.07.15
申请号 WO1998EP07405 申请日期 1998.11.18
申请人 STEAG MICROTECH GMBH;OSHINOWO, JOHN 发明人 OSHINOWO, JOHN
分类号 H01L21/304;B01J19/10;B08B3/12;H01L21/00 主分类号 H01L21/304
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