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发明名称
POSITION FIXING APPARATUS OF WAFER CASSETTE
摘要
申请公布号
KR200151330(Y1)
申请公布日期
1999.07.15
申请号
KR19960002383U
申请日期
1996.02.15
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, MIN-WOO
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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