发明名称 CONTINUOUS VACUUM LAMINATION TREATMENT SYSTEM AND VACUUM LAMINATION APPARATUS
摘要 A continuous vacuum lamination treatment system including at least (i) a stacking work area for stacking necessary members to form a stacked body to be subjected to vacuum lamination treatment, (ii) a vacuuming work area for vacuuming said stacked body, (iii) a heating work area for subjecting said stacked body to heat treatment, said work areas being arranged in a circle-like arrangement while being neighbored to each other; wherein the formation of said stacked body in the stacking work area is conducted on a plurality of vacuum lamination instruments capable of optionally loading or unloading and capable of optionally traveling to each work area, and vacuum lamination treatment for the stacked bodies on the vacuum lamination instruments is continuously conducted while moving the lamination instruments to successively travel the work areas (i) through (iii) in the named order. A vacuum lamination apparatus which is suitable to use as the vacuum lamination instrument used in the continuous vacuum lamination treatment system. <IMAGE>
申请公布号 KR100208413(B1) 申请公布日期 1999.07.15
申请号 KR19970038519 申请日期 1997.08.13
申请人 CANON KABUSHIKI KAISHA 发明人 YOSHINO, TAKEHITO;FUKAE, KIMITOSHI;INOUE, YUJI;ITOYAMA, SHIGENORI
分类号 H01L31/048;H01L31/18 主分类号 H01L31/048
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