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发明名称
ION SOURCE DEVICE
摘要
申请公布号
KR100210255(B1)
申请公布日期
1999.07.15
申请号
KR19930000808
申请日期
1993.01.21
申请人
TOKYO ELECTRON LIMITED
发明人
TANAKA, HISATO
分类号
H01J37/067;H01J27/04;H01J37/08;H01J37/15;H01J37/317;H01L21/265;(IPC1-7):H01J37/08
主分类号
H01J37/067
代理机构
代理人
主权项
地址
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