发明名称 POLISHING SOLUTION FEEDER
摘要 A polishing solution feeder capable of stably feeding a polishing solution having a predetermined abrasive grain size distribution to a polisher (22), including an ultrasonic oscillator (72) in at least a part of a polishing solution passage through which a polishing solution flows.
申请公布号 WO9929505(A8) 申请公布日期 1999.07.15
申请号 WO1998JP05541 申请日期 1998.12.08
申请人 EBARA CORPORATION;KIMURA, NORIO;HIYAMA, HIROKUNI;WADA, YUTAKA;KAWASHIMA, KIYOTAKA;TSUJIMURA, MANABU;KAWAMOTO, TAKAYOSHI 发明人 KIMURA, NORIO;HIYAMA, HIROKUNI;WADA, YUTAKA;KAWASHIMA, KIYOTAKA;TSUJIMURA, MANABU;KAWAMOTO, TAKAYOSHI
分类号 B24B37/04;B24B57/02;(IPC1-7):B24B57/02 主分类号 B24B37/04
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