发明名称 |
Photovoltaic element and method of and apparatus for manufacturing the same |
摘要 |
The photovoltaic element of the present invention is a photovoltaic element comprised of a semiconductor-junctioned element, characterized in that the element includes a first electrically conductive type semiconductor layer, a non-crystalline i type semiconductor layer, a microcrystalline i type semiconductor layer and a microcrystalline second electrically conductive type semiconductor layer and is pin-junctioned, and a method of and an apparatus for manufacturing the same are characterized by efficiently and continuously mass-producing the photovoltaic element having an excellent current-voltage characteristic and excellent photoelectric conversion efficiency. Thereby, there are provided a photovoltaic element in which the junction interface between the non-crystalline i type layer and the microcrystalline electrically conductive type layer has good grating consistency and which has an excellent current-voltage characteristic and excellent photoelectric conversion efficiency, and a method of and an apparatus for continuously mass-producing the same. <IMAGE> |
申请公布号 |
EP0828301(A3) |
申请公布日期 |
1999.07.14 |
申请号 |
EP19970115342 |
申请日期 |
1997.09.04 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OKABE, SHOTARO;FUJIOKA, YASUSHI;KANAI, MASAHIRO;SAKAI, AKIRA;SAWAYAMA, TADASHI;KOHDA, YUZO;HORI, TADASHI;YAJIMA, TAKAHIRO |
分类号 |
G03G5/08;C23C16/50;C23C16/511;H01L21/205;H01L31/04;H01L31/075;H01L31/076;H01L31/20 |
主分类号 |
G03G5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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