发明名称 |
Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever |
摘要 |
An integrated SPM sensor including a cantilever having a probe on its free end, a supporting base for supporting the cantilever on its fixed end, and signal lines for conducting a signal picked up by the probe. The probe is a photodetector element constructed of any of a junction gate-type photo FET, a Schottky gate-type photo FET, an MOS-type photodiode and a Schottky-type photodiode. The integrated SPM sensor substantially lowers noise due to thermally excited dark current and easily detects weak incident light.
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申请公布号 |
US5923033(A) |
申请公布日期 |
1999.07.13 |
申请号 |
US19950528207 |
申请日期 |
1995.09.12 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
TAKAYAMA, MICHIO;MATSUMOTO, KAZUYA;KAMIYA, YOSHITAKA;HASEGAWA, MAMORU |
分类号 |
G01B7/34;G01Q70/14;G01Q70/16;G02B21/00;(IPC1-7):G01B7/34 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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