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发明名称
SEMICONDUCTOR-INSPECTING DEVICE
摘要
申请公布号
JPH11190758(A)
申请公布日期
1999.07.13
申请号
JP19970361167
申请日期
1997.12.26
申请人
FUJITSU LTD
发明人
MARUYAMA SHIGEYUKI
分类号
G01R31/26;G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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