CARBON FIBER-REINFORCED CARBONACEOUS COMPOSITE CRUCIBLE FOR PULL-UP OF SEMICONDUCTOR SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide the subject composite crucible repeatedly usable over a long period through specifying the bulk density, open porosity, carbon fiber, and its content in the cylindrical body constituting esp. the straight shell portion of a graphite crucible based on the result of investigating the cause of the formation of the silicified layer of conventional carbon fiber-reinforced carbonaceous composite crucibles. SOLUTION: This carbon fiber-reinforced carbonaceous composite crucible 10 is made up of a frame constituting the bottom and a cylindrical body which is mounted on the upper part peripheral edge of the frame and divided into two or more portions; wherein at least the cylindrical body 12 contains 15-65 vol.% of carbon fiber comprising 500-50,000 filaments, having a bulk density of 1.30-1.90 g/cm<3> and an open porosity of 4-20%.