ROLL MADE OF VITRIFIED CARBON, ITS PRODUCTION, PLASMA GENERATOR, ITS CHAMBER INNER WALL PROTECTING MEMBER, PROTECTION OF THE CHAMBER INNER WALL AND PLASMA TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a large-sized dense and flexible roll made of vitrified carbon and a method for producing the roll and a chamber inner wall protecting member for a plasma generator capable of preventing reduction in yield caused by metal contamination of semiconductor wafer and a discharged foreign matter and readily removing a deposit film of the plasma generator. SOLUTION: This method for producing a roll made of vitrified carbon comprises molding a thermosetting resin into a roll shape and subjecting it to carbonizing and baking. The roll made of vitrified carbon has such a flexibility as to shrink its outer diameter in a state of no applied external force into an outer diameter corresponding to <=97% the outer diameter. The chamber inner wall protecting material for a plasma generator composed of the roll made of vitrified carbon obtained by the production method has <=100 μm maximum pore diameter.