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发明名称
MEASURING METHOD FOR SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH11190739(A)
申请公布日期
1999.07.13
申请号
JP19970367660
申请日期
1997.12.26
申请人
HITACHI CONSTR MACH CO LTD
发明人
MORIMOTO TAKASHI;MURAYAMA TAKESHI;KURODA HIROSHI;ONOZATO AKIMASA;SHIRAI TAKASHI;NISHIGAKI TAKESHI
分类号
G01B21/20;G01N37/00;G01Q30/04;G01Q90/00;(IPC1-7):G01N37/00
主分类号
G01B21/20
代理机构
代理人
主权项
地址
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