PRODUCTION OF ORGANIC COLORED THIN FILM

摘要

PROBLEM TO BE SOLVED: To form a thin film excellent in heat resistance, chemical resistance and optical property by heating an organic pigment with an evaporating source under an ethylene plasma atmosphere in a vacuum deposition device to sublime or evaporate to deposit on a substrate arranged above the evaporating source. SOLUTION: Ethylene gas supplied from a gas introducing line 5 is made into plasma in a vacuum chamber 1 provided with a ventilating valve 4 in an ion plating device 10 by a coil 6 impressed by a RF power source. The organic pigment 15 is heated and evaporated under the ethylene plasma atmosphere with the evaporating source 110 composed of a resistance heating boat 105 and a cap 111 having a small pore. The vaporized organic pigment collides with the plasma-activated ethylene and is stuck to the substrate 101 for color filter, which is heated to a prescribed temp. by a heater 102, in a state ethylene molecule is stuck to the surface. As a result, the organic pigment is rigidly combined by using ethylene molecule as a binder to form the hard, smooth and high quality organic colored thin film.