| 摘要 |
PROBLEM TO BE SOLVED: To provide a process capable of exactly and easily forming a recessed part of a large depth at the time of producing a thin-film magnetic head provided with at least part of the thin-film coil of the recessed part formed on a substrate. SOLUTION: A film 14 of metals, such as 'Permalloy (R)', copper and nickel, or a compd. of these metals, such as nickel boron, is formed as the film having an opening in the part to be formed with the recessed part on the surface of a substrate 11 and the recessed part 15 is formed by executing reactive ion etching with the metal or metal compd. as a mask. At the time of forming the metal or the metal compd. film, the metal or the metal compd. is adequately formed by selectively forming a photoresist film by photolithography in the part corresponding to the recessed part of the substrate surface, then depositing the metal or metal compd. by a plating method. |
