| 摘要 |
PROBLEM TO BE SOLVED: To simplify control processing for continuously measuring the surface shape of a measured object while copy-measuring it so as to measure the surface shape rapidly with high accuracy. SOLUTION: A contactless laser displacement gage 1 irradiates beams to a measured object W and outputs a displacement signal corresponding to surface shape. A Z-stage 5 moves the contactless laser displacement gage 1 in a Z- direction and outputs a displacement signal corresponding to the moving quantity. An automatic focusing unit 6 controls the movement of the Z-stage 5 for copy measurement, and adds the displacement signals from the contactless laser displacement gage 1 and the Z-stage 5 and outputs the added displacement signals as a displacement signal of the measured object W. A control means 20 controls the movement of X-, Y-stages 2, 3 and analyzes surface shape such as the height, width and sectional area of the measured object W on the basis of the displacement signal outputted from the automatic focusing unit 6. |
