发明名称 Black matrix laminated film and reactive sputtering apparatus
摘要 It is an object of the present invention is to provide a color liquid crystal display depicting clear images on the screen by decreasing the reflectance of external light such as solar light and room light on the black matrix. A black matrix including a laminated film is provided. The laminated film includes at least two layers each of which include at least two constituent elements. One layer is a transition layer in which the content of one of the constituent elements increases along an incident direction of external light. Also provided is a reactive sputtering apparatus suitable for preparing the laminated film for the black matrix of the present invention.
申请公布号 US5922181(A) 申请公布日期 1999.07.13
申请号 US19970839862 申请日期 1997.04.22
申请人 ANELVA CORPORATION 发明人 IWATA, HIROSHI
分类号 G02F1/1333;C23C14/02;G02F1/1335;(IPC1-7):C23C14/34 主分类号 G02F1/1333
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